DocumentCode :
2189895
Title :
Contact printing with nanometer resolution
Author :
Loo, Y.-L. ; Willett, R.L. ; Baldwin, K.W. ; Rogers, J.A.
Author_Institution :
Bell Labs., Lucent Technol., Murray Hill, NJ, USA
fYear :
2002
fDate :
24-26 June 2002
Firstpage :
149
Lastpage :
150
Abstract :
Developed a purely additive contact printing technique that can, in a single step, form complex patterns of functional materials with nanometer resolution. This method can print directly nanostructures without the use of sacrificial resists, etching procedures or post-patterning deposition steps that are often required with other nanolithographic techniques. It is operationally simple, compatible with a wide range of materials (metals, dielectrics, etc.) and substrates (rigid inorganics, flexible plastics, etc.) and capable of patterning large areas under ambient conditions. The method, which we refer to as nanotransfer printing (nTP), involves the controlled transfer of material from the raised regions of reusable stamps onto the surfaces of substrates. Pattern transfer is driven by interfacial chemical and physical reactions that are initiated when the substrate and the stamp are brought into contact. We demonstrate the versatility of nTP by printing nanometer and micron scale metal patterns in the geometries of 2D photonic waveguides and electrostatic lenses and by building two functional devices on flexible substrates: high performance organic thin film transistors (TFTs) and thin film inorganic metal-insulator-metal (MIM) capacitors.
Keywords :
MIM devices; electrostatic lenses; integrated optics; nanocontacts; printing; thin film transistors; 2D photonic waveguides; MIM capacitors; electrostatic lenses; flexible substrates; functional materials; metal patterns; nanometer resolution; nanostructures; nanotransfer printing; organic thin film transistors; purely additive contact printing technique; reusable stamps; Additives; Dielectric materials; Dielectric substrates; Etching; Metal-insulator structures; Nanostructured materials; Nanostructures; Organic thin film transistors; Printing; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference, 2002. 60th DRC. Conference Digest
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-7317-0
Type :
conf
DOI :
10.1109/DRC.2002.1029566
Filename :
1029566
Link To Document :
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