Title :
High frequency measurement of dielectric thin films
Author :
Singh, P.K. ; Cochrane, R.S. ; Borrego, J.M. ; Rymaszewski, E.J. ; Lu, T.M. ; Chen, K.
Author_Institution :
Center for Integrated Electron., Rensselaer Polytech. Inst., Troy, NY, USA
Abstract :
A test vehicle was designed that enabled the measurement of the dielectric constant and loss tangent of thin dielectric films from 1 KHz to 40 GHz. The test vehicle consists of a metal-dielectric-metal parallel plate structure. The measurements were made with a LCR meter and a network analyzer.<>
Keywords :
dielectric loss measurement; dielectric thin films; microwave measurement; network analysers; permittivity measurement; 1 kHz to 40 GHz; LCR meter; dielectric constant; dielectric thin films; loss tangent; metal-dielectric-metal parallel plate structure; network analyzer; test vehicle; Dielectric constant; Dielectric films; Dielectric loss measurement; Dielectric measurements; Dielectric thin films; Frequency measurement; Loss measurement; Testing; Vehicles;
Conference_Titel :
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1778-5
DOI :
10.1109/MWSYM.1994.335137
