Title :
Development of cylindrical two-dimensional linear oscillatory actuator
Author :
Honda, Yukari ; Torii, Susumu ; Ebihara, Daiki ; Hasegawa, Yuya ; Hirata, Katsuhiro
Author_Institution :
Dept. of Electr. & Electron. Eng., Musashi Inst. of Technol., Tokyo
Abstract :
In the industrial world, the actuator that carries out a multi-dimension drive and simple structure is rapidly performed. The actuator that operates the direction of z-thetas is needed in the manufacturing processes such as semiconductors and the liquid crystals. In this paper, the construction of the two-dimensional oscillatory actuator with magnetic attractive force is proposed and designed. The basic characteristics of the flux density are measured to analyze this actuator
Keywords :
DC motors; electric actuators; cylindrical two-dimensional linear oscillatory actuator; flux density; liquid crystals; manufacturing processes; multi-dimension drives; Attenuation; Difference equations; Hydraulic actuators; Magnetic resonance; Reliability engineering; Resonant frequency; Shafts; Springs; Stators; Torque;
Conference_Titel :
Power Electronics, Electrical Drives, Automation and Motion, 2006. SPEEDAM 2006. International Symposium on
Conference_Location :
Taormina
Print_ISBN :
1-4244-0193-3
DOI :
10.1109/SPEEDAM.2006.1649781
