Title :
Direct linear drives for the application in high vacuum
Author :
Budig, Peter- Klaus
Author_Institution :
EAAT GmbH Chemnitz
Abstract :
High-vacuum application demands for clean-room conditions. Therefore there is no chance to use roller bearings, air-cushion bearings or even slide bearings. On the other side making motion must be made without mechanical contact f.i. as in a rail-wheel system or similar. Therefore a design was chosen with a permanent magnetic bearing and a linear- drive system
Keywords :
linear motors; magnetic bearings; motor drives; direct linear drives; linear-drive system; permanent magnetic bearing; Chemical vapor deposition; Machine tools; Magnetic fields; Magnetic levitation; Microelectronics; Permanent magnet motors; Permanent magnets; Pumps; Rolling bearings; Wheels;
Conference_Titel :
Power Electronics, Electrical Drives, Automation and Motion, 2006. SPEEDAM 2006. International Symposium on
Conference_Location :
Taormina
Print_ISBN :
1-4244-0193-3
DOI :
10.1109/SPEEDAM.2006.1649786
