Specific design rules for micro linear motors

This paper reports on the differences designing linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. Special rules resulting from the different materials and fabrication processes is discussed and analyzed using a finite element method. As a result of the rules a linear stepping motor has been designed and fabricated. At the end the results of thermal and force measurements of a fabricated micro motor are presented and show the utilisability of the actuator and the quality of the calculation tools