Ion micro-beam diagnostics with scintillators for application of deep lithography with particles

We have developed two techniques for microscopic particle beam imaging and dose measurement, both based on scintillators. One employs a scintillating fiberoptic plate to display the 2D beam transversal profile, the other makes use of a small scintillator optically coupled to a compact photomultiplier. We have proved the possibility of spanning from single beam particles counting up to several nA currents. Both the devices are successfully being exploited for on-line control of low and very low intensity proton beams, down to a beam size of <50 μm, in the framework of Deep Lithography with Protons oriented to the production of optical micro components.