Title :
Thickness measurement for Cu and Ta thin films using optoacoustics
Author :
Gostein, M. ; Bailey, T.C. ; Emesh, I. ; Diebold, A.C. ; Maznev, A.A. ; Banet, M. ; Joffe, M. ; Sacco, R.
Author_Institution :
Philips Anal., Natick, MA, USA
Abstract :
New all-optical, nondestructive metrology instruments for metal film thickness measurement have been developed using the opto-acoustic technique impulsive stimulated thermal scattering (ISTS). The technique uses lasers to initiate and detect acoustic waves in the sample film. In this study, a commercial ISTS-based instrument is evaluated for measuring Cu and Ta thin films, and the results are compared with 4-point probe, SEM, TEM, and GIXR. We also show that ISTS can be used in conjunction with 4-point-probe to determine resistivity for thin PVD Cu films
Keywords :
copper; electrical resistivity; measurement by laser beam; metallic thin films; photoacoustic spectra; tantalum; thickness measurement; 4-point-probe; Cu; Ta; impulsive stimulated thermal scattering; nondestructive metrology; optoacoustics; resistivity; thickness measurement; thin films; Acoustic measurements; Acoustic scattering; Acoustic signal detection; Acoustic waves; Conductivity; Instruments; Metrology; Probes; Thickness measurement; Transistors;
Conference_Titel :
Interconnect Technology Conference, 2000. Proceedings of the IEEE 2000 International
Conference_Location :
Burlingame, CA
Print_ISBN :
0-7803-6327-2
DOI :
10.1109/IITC.2000.854317
