Title :
High Q inductors for MCM-Si technology
Author :
Klemmer, Nikolaus ; Hartung, Jürgen
Author_Institution :
Ericsson Res. & Dev., Research Triangle Park, NC, USA
Abstract :
Spiral inductors for microwave applications have been integrated on a silicon substrate in Multi Chip Module (MCM) technology. The fabricated inductors exhibit quality factors of up to 23. To the authors knowledge, these are the highest values for inductors on silicon reported so far. A software tool has been developed for fast and accurate design of planar spiral inductors
Keywords :
Q-factor; inductors; microwave integrated circuits; multichip modules; silicon; MCM-Si technology; Si; design; microwave applications; multi chip module; planar spiral inductor; quality factor; silicon substrate; software tool; Application software; Conductivity; Costs; Frequency; Inductance; Q factor; Silicon; Spirals; Substrates; Thin film inductors;
Conference_Titel :
Multi-Chip Module Conference, 1997. MCMC '97., 1997 IEEE
Conference_Location :
Santa Cruz, CA
Print_ISBN :
0-8186-7789-9
DOI :
10.1109/MCMC.1997.569342
