Application of Dielectric, Ferroelectric and Piezoelectric Thin Film Devices in Mobile Communication and Medical Systems

Author

Klee, M. ; Beelen, D. ; Keur, W. ; Kiewitt, R. ; Kumar, B. ; Mauczok, R. ; Reimann, K. ; Renders, Ch ; Roest, A. ; Roozeboom, F. ; Steeneken, P. ; Tiggelman, M. ; Vanhelmont, F. ; Wunnicke, Olaf ; Lok, P. ; Neumann, K. ; Fraser, J. ; Schmitz, G.

Author_Institution

Philips Res., Eindhoven

fYear

2006

fDate

July 30 2006-Aug. 3 2006

Firstpage

9

Lastpage

16

Abstract

Dielectric, ferroelectric and piezoelectric thin films are getting more and more attention for next generation mobile communication and medical systems. Thin film technologies based on dielectric, ferroelectric and piezoelectric thin films enable system-in-package (SiP) devices, resulting in optimal integration of various functions in one module with respect to high performance, small size and low cost. Within Philips a passive integration platform for SiP technologies is developed, comprising key functions such as RF filters, micro-electromechanical switches, high-value capacitors as well as passive and active functions integrated in small modules. The piezoelectric thin film technologies do not only play a role for RF filters, but are also a breakthrough technology for a new class of thin film ultrasonic transducers.

Keywords

biomedical electronics; ferroelectric thin films; mobile communication; piezoelectric thin films; system-in-package; ultrasonic transducers; SiP devices; dielectric thin films; ferroelectric thin films; medical systems; mobile communication; passive integration platform; piezoelectric thin films; system-in-package devices; ultrasonic transducers; Cost function; Dielectric devices; Dielectric thin films; Ferroelectric materials; Mobile communication; Passive filters; Piezoelectric films; Radio frequency; Switches; Thin film devices; System in Package; dielectric; ferroelectric; piezoelectric thin films; thin film ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the

Conference_Location

Sunset Beach, NC

ISSN

1099-4734

Print_ISBN

978-1-4244-1331-7

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2006.4387821

Filename

4387821