Title :
Gecko inspired Electrostatic Chuck
Author :
Berengueres, Jose ; Urago, Masataka ; Saito, Shigeki ; Tadakuma, Kenjiro ; Meguro, Hiroyuki
Author_Institution :
Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Tokyo
Abstract :
We introduce a climbing system, inspired by gecko foot that uses Electrostatic Chuck (ESC) in place of Van der Waals interaction. Electrostatic chucks are currently used in wafer foundries to pick-up and move delicate thin semiconductor wafers. The properties of ESC make it an interesting adhesion force for wall mobility applications. However the great dependency of current ESCs\´ adhesion force on the surface roughness of the substrate renders them ineffective in "normal-roughness" walls. By combining ESC adhesion with gecko\´s foot-hair surface-roughness adaptability function we propose a device for wall mobility applications.
Keywords :
adhesion; biomimetics; electrostatic actuators; electrostatics; mobile robots; surface roughness; van der Waals forces; Van der Waals interaction; adhesion force; climbing system; foot-hair surface-roughness adaptability function; gecko inspired electrostatic chuck; semiconductor wafers; wafer foundries; wall mobility applications; Adhesives; Biomimetics; Electrodes; Electrons; Electrostatics; Foot; Hair; Robots; Rough surfaces; Surface roughness; ESC; Van der Waals force; climbing; distributed adhesion; electrostatic chuck; gecko; surface roughness; wall;
Conference_Titel :
Robotics and Biomimetics, 2006. ROBIO '06. IEEE International Conference on
Conference_Location :
Kunming
Print_ISBN :
1-4244-0570-X
Electronic_ISBN :
1-4244-0571-8
DOI :
10.1109/ROBIO.2006.340368
