PZT Films on Wafers and Fibers for MEMS Application

Author

Thapliyal, Ratnesh ; Pellision, Aude ; Logvinovich, Dmitry ; Amberg, Martin ; Hug, Hans Josef ; Fortunato, Guglielmo

Author_Institution

Empa -Mater. Sci. & Technol., St. Gallen

fYear

2006

fDate

July 30 2006-Aug. 3 2006

Firstpage

336

Lastpage

339

Abstract

A single PZT metallic target has been utilized to deposit lead zirconate titanate (PZT) films by DC pulsed magnetron sputtering on Ti/Pt(111 )/Ti coated Si wafer and on Au coated glass fibers. Multicrystalline PZT films were obtained after post treatment by conventional (CA) and rapid thermal annealing (RTA) at 650degC in air and vacuum. The influences of both post-annealing treatments on the film properties were evaluated. Conventional annealed films showed a different texture orientation than RTA annealed films. It has been observed that conventional annealed films show higher remanent polarization and lesser coercive field than RTA annealed films. PZT films were also successfully deposited on Au coated glass fibers. Coated fibers were post annealed by RTA@600degC to obtain a PZT structure. Surface morphology of the films showed that the CA annealed films have denser grains and less crack formations than RTA annealed films. Coated fibers show a dense and crack free structure.

Keywords

coercive force; dielectric polarisation; ferroelectric thin films; gold; lead compounds; micromechanical devices; platinum; rapid thermal annealing; silicon; sputter deposition; sputtered coatings; surface morphology; titanium; Au; CA annealed films; DC pulsed magnetron sputtering; MEMS application; PZT; RTA annealed films; Si; coercive field; conventional annealed films; crack free coated fiber structure; ferroelectric properties; film properties; film surface morphology; gold coated glass fibers; lead zirconate titanate films; multicrystalline PZT films; post annealed coated fibers; rapid thermal annealing; remanent polarization; temperature 600 C; temperature 650 C; texture orientation; titanium coated silicon wafer; Glass; Gold; Micromechanical devices; Optical fiber polarization; Rapid thermal annealing; Semiconductor films; Sputtering; Surface cracks; Surface morphology; Titanium compounds; DC pulsed magnetron; PZT; fiber; post annealing;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the

Conference_Location

Sunset Beach, NC

ISSN

1099-4734

Print_ISBN

978-1-4244-1331-7

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2006.4387900

Filename

4387900