Title :
Theory, design and operation of surface generated acoustic wave sensors
Author :
Vetelino, J.F. ; Andle, J.C. ; Falconer, R.S.
Author_Institution :
Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA
Abstract :
Surface generated acoustic waves (SGAW) excited in a piezoelectric medium provide an attractive technology to realize a family of microsensors which are sensitive, portable, cheap and small. In this paper two SGAW microsensors namely, the surface acoustic wave gas sensor and the acoustic plate mode biosensor are described. Results indicate that these sensors are extremely sensitive to the measurand of interest.<>
Keywords :
acoustic transducers; biosensors; gas sensors; portable instruments; surface acoustic wave devices; acoustic plate mode biosensor; microsensors; piezoelectric medium; portable SGAW microsensors; surface acoustic wave gas sensor; surface generated acoustic wave sensors; Acoustic measurements; Acoustic sensors; Acoustic waves; Biosensors; Gas detectors; Microsensors; Surface acoustic waves;
Conference_Titel :
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1778-5
DOI :
10.1109/MWSYM.1994.335445
