Title :
Characteristic of leaky surface acoustic wave propagating along liquid/SiO/sub 2LiNbO/sub 3/ and its application to liquid sensor
Author :
Furukawa, S. ; Nishimura, R. ; Obana, M. ; Nomura, T. ; Yasuda, T.
Author_Institution :
Dept. of Comput. Sci. & Electron., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
We propose polystyrene/(36/spl deg/ rot. Y-X) LiNbO/sub 3/ and SiO/sub 2/ (fused silica)/(36/spl deg/ rot. Y-X)LiNbO/sub 3/ structures for the viscosity sensor, in which the shear horizontal (SH) component of the leaky surface acoustic wave (LSAW) becomes larger than that of the case without polystyrene and/or SiO/sub 2/. For glycerin/SiO/sub 2/ (40 /spl mu/m)/(36/spl deg/ rot. Y-X) LiNbO/sub 3/, the propagation loss of LSAW due to the viscosity of glycerin is four times larger than that for glycerin/(36/spl deg/ rot. Y-X)LiNbO/sub 3/ (30 MHz). Therefore, the viscosity coefficient of liquids is well estimated from the propagation loss of LSAW.<>
Keywords :
lithium compounds; silicon compounds; surface acoustic wave devices; viscosity measurement; viscosity of liquids; SiO/sub 2/-LiNbO/sub 3/; SiO/sub 2LiNbO/sub 3/ structures; glycerin; leaky surface acoustic wave; liquid sensor; propagation loss; shear horizontal component; viscosity coefficient; viscosity sensor; Acoustic propagation; Acoustic sensors; Acoustic waves; Liquids; Propagation losses; Sensor phenomena and characterization; Silicon compounds; Surface acoustic waves; Viscosity;
Conference_Titel :
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1778-5
DOI :
10.1109/MWSYM.1994.335448
