Title :
Microwave Properties of AgTa0.5Nb0.5O3 Thin Film Varactors on Various Substrates
Author :
Kim, Jang-Yong ; Grishin, Alexander M.
Author_Institution :
R. Inst. of Technol., Stockholm
fDate :
July 30 2006-Aug. 3 2006
Abstract :
AgTa0.5Nb0.5O3 (ATN) 400 nm thick films have been sintered by pulsed laser deposition technique on LaAIO3 (001), sapphire (Al2O3-011_2, r-cut) single crystal substrates and Corning 7059 glass. Photolithography and metal lift-off technique were used to fabricate tunable coplanar waveguide interdigital capacitors (CPWIDCs). On-wafer test of varactors was performed with microwave network analyzer and G-S-G microwave probe. ATN/LaAIO3 capacitors demonstrated the highest tunability (~5.8%@20GHz), ATN/Glass showed the best flat dispersion (-3.9%) and ATN/ AI2O3 showed the lowest loss tangent (~0.06@20GHz) in the microwave range from 1 to 40 GHz.
Keywords :
ceramic capacitors; coplanar waveguide components; lanthanum compounds; microwave devices; photolithography; pulsed laser deposition; sapphire; silver compounds; tantalum compounds; thin film devices; varactors; AgTa0.5Nb0.5O3; Al2O3; Corning 7059 glass; G-S-G microwave probe; LaAlO3; ceramic thin film; frequency 1 GHz to 40 GHz; metal lift-off technique; microwave network analyzer; microwave properties; on-wafer test; photolithography; pulsed laser deposition technique; sintering; thin film varactors; tunable coplanar waveguide interdigital capacitors; voltage tunable key devices; Capacitors; Glass; Laser sintering; Lithography; Masers; Niobium; Optical pulses; Pulsed laser deposition; Thick films; Waveguide lasers; Ceramic thin film; Coplanar waveguides; Scattering parameters; Voltage tunable devices;
Conference_Titel :
Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the
Conference_Location :
Sunset Beach, NC
Print_ISBN :
978-1-4244-1331-7
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2006.4387906
