Nano-meter electrode fabrication technology using electro-chemical effects and applications to 15 GHz-range surface acoustic wave devices

Author

Yamanouchi, K. ; Meguro, T. ; Wagatsuma, Y. ; Odagawa, H. ; Yamamoto, K.

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

fYear

1994

fDate

23-27 May 1994

Firstpage

1221

Abstract

New lithography techniques of below 500 A electrode width are proposed. The electrodes are fabricated by using extreme thin anodic oxidation films (AOF) composed using electro-chemical effects as resists. The results show the 750 A width electrode using wet etching techniques and 1000 A using dry etching techniques. The experimental results of unidirectional interdigital transducer (IDT) and 17 GHz-range Surface Acoustic Waves filters are demonstrated using the electrode width of 600 A.<>

Keywords

etching; lithography; microelectrodes; microwave filters; nanotechnology; surface acoustic wave devices; surface acoustic wave filters; 1000 angstrom; 15 to 17 GHz; 750 angstrom; anodic oxidation films; dry etching techniques; electro-chemical effects; lithography techniques; nanometer electrode fabrication technology; surface acoustic wave devices; surface acoustic waves filters; unidirectional interdigital transducer; wet etching techniques; Acoustic transducers; Acoustic waves; Dry etching; Electrodes; Fabrication; Lithography; Oxidation; Resists; Surface acoustic waves; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1994., IEEE MTT-S International

Conference_Location

San Diego, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-1778-5

Type

conf

DOI

10.1109/MWSYM.1994.335566

Filename

335566