Laser initiation and radiofrequency sustainment of seeded air plasmas

Author

Scharer, J. ; Cao, R. ; Gui, H. ; Kelly, K. ; Paller, E. ; Sund, R.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

2000

fDate

4-7 June 2000

Firstpage

84

Abstract

Summary form only given. Seeded gas plasmas and air constituents have been created by a 193 nm laser and radiofrequency sources. We have obtained 10/sup 14//cm/sup 3/ plasma densities with initial electron temperatures of 0.3 eV in TMAE (tetrakis (dimethylamino) ethylene) by laser photoionization. We developed a fast Langmuir probe analysis of plasma decay independent of ion species mix. Langmuir probe and optical emission data illustrating the density and temperature decay with TMAE mixed with nitrogen is presented. Simulations of antenna coupling, wave frequencies, wave propagation, and power absorption are compared with experimental observations for radiofrequency plasma sources. The source produces plasma densities of 2/spl times/10/sub 13//cm/sup 3/ in an 8500 cm/sup 3/ volume at electron temperatures of 5 eV in 10 mTorr Ar in a nonuniform magnetic field. Radiofrequency plasma production at pressures from 2700 Torr using Ar and laser initiated TMAE plasmas as seeds will be discussed.

Keywords

Langmuir probes; air; plasma density; plasma diagnostics; plasma production by laser; plasma temperature; 0.3 eV; 10 mtorr; 193 nm; 2700 torr; 5 eV; Ar; UV laser; air constituents; antenna coupling; density decay; electron temperatures; fast Langmuir probe analysis; gas plasmas; initial electron temperatures; ion species mixing; laser initiated TMAE plasmas; laser initiation; laser photoionization; optical emission; plasma decay; plasma densities; power absorption; radiofrequency plasma production; radiofrequency plasma sources; radiofrequency sources; radiofrequency sustainment; seeded air plasmas; simulations; temperature decay; tetrakis (dimethylamino) ethylene; wave frequencies; wave propagation; Argon; Electrons; Gas lasers; Ionization; Plasma density; Plasma simulation; Plasma sources; Plasma temperature; Probes; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on

Conference_Location

New Orleans, LA, USA

ISSN

0730-9244

Print_ISBN

0-7803-5982-8

Type

conf

DOI

10.1109/PLASMA.2000.854545

Filename

854545