Title :
Deposition of thin film ceramics and ceramic nanocomposites by inductively coupled plasma assisted hybrid chemical/physical vapor deposition
Author :
Wen Jin Meng ; Bao Feng ; Dong Mei Cao
Author_Institution :
Louisiana State University
Abstract :
Summary form only given.
Keywords :
Ceramics; Cities and towns; Implants; Materials science and technology; Nanocomposites; Physics; Plasma immersion ion implantation; Plasma materials processing; Sputtering; Steady-state;
Conference_Titel :
Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-5982-8
DOI :
10.1109/PLASMA.2000.854553
