Title :
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance
Author :
Hyun, Chul ; Lee, Jang Gyu ; Kang, Taesam
fDate :
April 25-27, 2006
Keywords :
Acceleration; Accelerometers; Aerodynamics; Feedback; Harmonic analysis; Limit-cycles; Micromechanical devices; Nonlinear dynamical systems; Resonance; Sensor phenomena and characterization;
Conference_Titel :
Position, Location, And Navigation Symposium, 2006 IEEE/ION
Print_ISBN :
0-7803-9454-2
DOI :
10.1109/PLANS.2006.1650649