DocumentCode
2200819
Title
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance
Author
Hyun, Chul ; Lee, Jang Gyu ; Kang, Taesam
fYear
2006
fDate
April 25-27, 2006
Firstpage
594
Lastpage
598
Keywords
Acceleration; Accelerometers; Aerodynamics; Feedback; Harmonic analysis; Limit-cycles; Micromechanical devices; Nonlinear dynamical systems; Resonance; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Position, Location, And Navigation Symposium, 2006 IEEE/ION
Print_ISBN
0-7803-9454-2
Type
conf
DOI
10.1109/PLANS.2006.1650649
Filename
1650649
Link To Document