DocumentCode :
2200878
Title :
A method for real-time control of thin film composition using OES and XPS
Author :
Ni, Dong ; Lou, Yiming ; Christofides, Panagiotis D. ; Sha, Lin ; Lao, Sandy ; Chang, Jane P.
Author_Institution :
University of California
Volume :
2
fYear :
2003
fDate :
June 4-6, 2003
Firstpage :
1320
Lastpage :
1327
Keywords :
Chemical vapor deposition; Dielectric thin films; Feedback control; Inorganic materials; Leakage current; Optical control; Optical films; Plasma chemistry; Sputtering; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
American Control Conference, 2003. Proceedings of the 2003
ISSN :
0743-1619
Print_ISBN :
0-7803-7896-2
Type :
conf
DOI :
10.1109/ACC.2003.1239773
Filename :
1239773
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2200878
