DocumentCode
2200878
Title
A method for real-time control of thin film composition using OES and XPS
Author
Ni, Dong ; Lou, Yiming ; Christofides, Panagiotis D. ; Sha, Lin ; Lao, Sandy ; Chang, Jane P.
Author_Institution
University of California
Volume
2
fYear
2003
fDate
June 4-6, 2003
Firstpage
1320
Lastpage
1327
Keywords
Chemical vapor deposition; Dielectric thin films; Feedback control; Inorganic materials; Leakage current; Optical control; Optical films; Plasma chemistry; Sputtering; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2003. Proceedings of the 2003
ISSN
0743-1619
Print_ISBN
0-7803-7896-2
Type
conf
DOI
10.1109/ACC.2003.1239773
Filename
1239773
Link To Document