An approach for the study of reliability for a MEMS magnetic actuator

Author

Berkcan, E. ; Chandrasekaran, S. ; Aimi, M.

Author_Institution

GE Global Res., Niskayuna

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

45

Lastpage

48

Abstract

This paper presents a summary of the design for reliability and the reliability test procedures used for the design, fabrication and testing of a MEMS magnetic actuator. The MEMS device reliability is determined incorporating device structure, its fabrication process, the packaging, & their interacting contributions. The goal of the MEMS actuator reliability design task is to increase the probability of failure free operation of a MEMS based system for a specified time period and the use environment. The design for reliability and the subsequent reliability testing procedures are used to determine the reliability of the MEMS actuator and enable the determination of the reliability of the final product that the MEMS device is becoming part of.

Keywords

electromagnetic actuators; failure analysis; microactuators; semiconductor device reliability; MEMS actuator reliability design; MEMS based system; MEMS device reliability; MEMS magnetic actuator; design for reliability; device structure; fabrication process; failure free operation probability; Actuators; Automotive engineering; Electronic equipment testing; Fabrication; Life estimation; Life testing; Microelectromechanical devices; Micromechanical devices; Packaging; Reliability engineering;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388332

Filename

4388332