Modeling and performance analysis of semiconductor manufacturing systems

It is difficult to conduct performance evaluation of shared-resource manufacturing systems because of the complex behaviour. We propose a method for evaluating the performance of prioritized processes with shared resources modeling a class of semiconductor manufacturing systems. Markovian timed Petri nets are first used to represent systems with process priorities, routing priorities, resource re-entrance and nonpreemptive operations. Uniformization technique is then used to established both lower and upper bounds of the performance of interest. These bounds are computable using linear programming.