Title :
Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications
Author :
Oprea, A. ; Bârsan, N. ; Weimar, U. ; Courbat, J. ; Briand, D. ; de Rooij, N.F.
Author_Institution :
Univ. of Tuebingen, Tubingen
Abstract :
Temperature, gas and humidity resistive/ capacitive sensors on flexible substrates from organic materials, suitable for RFID mobile applications, have been produced and investigated. The sensor implementation solutions are providing simple, versatile and low power temperature and gas detection. The device structure was developed together with the data evaluation strategies based on last generation SigmaDelta analog (resistance and capacitance) to digital converters. We demonstrate the possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses. The proposed device concept is aimed to evolve towards "flexible & full plastic" implementations.
Keywords :
gas sensors; humidity sensors; organic compounds; radiofrequency identification; sigma-delta modulation; temperature sensors; wireless sensor networks; RFID mobile application; analog-to-digital converter; flexible substrate; gas sensor; humidity sensor; integrated sensor; low-power application; organic material; resistive/capacitive sensor; sigma-delta converter; temperature sensor; Capacitance; Chemical sensors; Electrodes; Gas detectors; Humidity; Intelligent sensors; Plastics; Radiofrequency identification; Temperature sensors; Testing;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388360