Integrated Temperature, Humidity and Gas Sensors on Flexible Substrates for Low-Power Applications

Author

Oprea, A. ; Bârsan, N. ; Weimar, U. ; Courbat, J. ; Briand, D. ; de Rooij, N.F.

Author_Institution

Univ. of Tuebingen, Tubingen

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

158

Lastpage

161

Abstract

Temperature, gas and humidity resistive/ capacitive sensors on flexible substrates from organic materials, suitable for RFID mobile applications, have been produced and investigated. The sensor implementation solutions are providing simple, versatile and low power temperature and gas detection. The device structure was developed together with the data evaluation strategies based on last generation SigmaDelta analog (resistance and capacitance) to digital converters. We demonstrate the possibility of developing gas sensors on humidity sensitive substrates, having temperature corrected responses. The proposed device concept is aimed to evolve towards "flexible & full plastic" implementations.

Keywords

gas sensors; humidity sensors; organic compounds; radiofrequency identification; sigma-delta modulation; temperature sensors; wireless sensor networks; RFID mobile application; analog-to-digital converter; flexible substrate; gas sensor; humidity sensor; integrated sensor; low-power application; organic material; resistive/capacitive sensor; sigma-delta converter; temperature sensor; Capacitance; Chemical sensors; Electrodes; Gas detectors; Humidity; Intelligent sensors; Plastics; Radiofrequency identification; Temperature sensors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388360

Filename

4388360