Title :
MicroBolometer on Polymer Membrane with Heat Feedback Control for Non Radiative Applications
Author :
Denoual, M. ; Delaunay, S. ; Durantel, F. ; Guillet, B. ; Lebargy, S. ; Robbes, D. ; Bastie, J.
Author_Institution :
ENSICAEN, Caen
Abstract :
This paper presents a microbolometer on a polymer membrane using heat feedback control. The target application of this device is basically infrared (IR) measurement in a wide wavelength range but can be extended to various purposes in particular chemical detection applications. A special attention was paid on characterisation and signal/noise ratio (SNR) study to optimize the performances. The interest of this work stands in the usage of thermal feedback with a microbolometer easily realized on a polymer membrane without any coolant and the proposed applications in chemical detection at room temperature.
Keywords :
bolometers; infrared detectors; microsensors; polymers; chemical detection applications; heat feedback control; infrared measurement; microbolometer; nonradiative applications; polymer membrane; signal noise ratio; thermal feedback; Biomembranes; Chemicals; Coolants; Feedback control; Infrared detectors; Particle measurements; Polymers; Signal to noise ratio; Temperature; Wavelength measurement;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388365