Title :
Precise Velocity Control of the Air Floating Gantry Type Precision Stage with the Acceleration Feedback Compensation
Author :
Karikita, Ichiro ; Mayeda, Hirokazu
Author_Institution :
Toray Eng. Co., Ltd., Otsu
Abstract :
Recently, the gantry type precision stage and its precise velocity control are required in the field of inspection machine and slit nozzle coater of the flat panel display, since the glass substrate becomes large. In this paper, the velocity control scheme with the acceleration feedback compensation is proposed and examined on a miniature gantry. It is shown that the acceleration PI (proportion and integral) feedback compensation is effective for reducing the velocity fluctuation and the range of deviation between the legs due to the input disturbance
Keywords :
PI control; acceleration; compensation; feedback; flat panel displays; inspection; precision engineering; production equipment; velocity control; acceleration PI feedback compensation; acceleration proportion-integral feedback compensation; air floating gantry; flat panel display; gantry type precision stage; glass substrate; machine inspection; miniature gantry; slit nozzle coater; velocity control scheme; velocity fluctuation reduction; Acceleration; Feedback; Flat panel displays; Fluctuations; Glass; Inspection; Leg; Low-frequency noise; Rails; Velocity control;
Conference_Titel :
TENCON 2006. 2006 IEEE Region 10 Conference
Conference_Location :
Hong Kong
Print_ISBN :
1-4244-0548-3
Electronic_ISBN :
1-4244-0549-1
DOI :
10.1109/TENCON.2006.344192
