Measurement of Ar(1s/sub 2/) population in a carbon plume excited by ArF excimer laser using a laser absorption method

Summary form only given. A laser absorption (LA) technique provides selective and absolute information on the excited species in discharge plasmas. We have been studying the processing of fine carbon particles using a pulsed laser deposition (PLD) controlled by RF plasma. In order to examine the interaction between a carbon plume plasma generated by irradiation of ArF excimer laser with fluence of 5 Jcm/sup -2/ to a graphite target and buffer Ar gas with pressures p between 0.05 and 20 Torr, the resonance Ar(1s/sub 2/) population was measured using a LA method. The diagnostic laser beam was emitted from a laser diode and was introduced into the plume at the distance d=1 mm from the target in parallel with its surface. The wavelength of the diode laser was tuned to the transition from Ar(1s/sub 2/) to Ar(2p/sub 2/), /spl lambda/=826.68 nm. The absorption signal was observed by an oscilloscope.