MEMS technology for biomedical applications

Author

Polla, Dennis L.

Author_Institution

Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

19

Abstract

MEMS technology is enabling a wide variety of biomedical systems. This technology is now integrating microscale sensors, actuators, microfluidics, micro-optics, and structural elements with computation, communications, and controls for application to medicine for the improvement of human health. Derived from the microfabrication technology used to make integrated circuits, bioMEMS is expected to revolutionize the way medicine is practiced and delivered. This paper presents an introductory overview of three exciting new opportunity areas for bioMEMS in medicine. These are surgical microsystems (intelligent micro-invasive surgical tools), diagnostic microsystems (biochips and related micro-instrumentation), and therapeutic micro-systems (health care management systems). Some representative examples based on work carried out at the University of Minnesota (USA) are presented, including (1) MEMS in precision surgery-ophthalmology; (2) MEMS in biomolecular recognition; and (3) MEMS in autonomous therapy management systems-micro-pumps for drug delivery. Selected human clinical trials of the application of BioMEMS are presented

Keywords

biomedical electronics; biomedical engineering; biomedical measurement; drug delivery systems; micro-optics; microactuators; microfluidics; micropumps; microsensors; surgery; MEMS technology; actuators; autonomous therapy management systems; bioMEMS; biochips; biomedical applications; biomedical systems; biomolecular recognition; computation; diagnostic microsystems; drug delivery; health care management systems; human clinical trials; human health; intelligent micro-invasive surgical tools; medicine; micro-instrumentation; micro-optics; micro-pumps; microfabrication technology; microfluidics; microscale sensors; ophthalmology; precision surgery; structural elements; surgical microsystems; therapeutic micro-systems; Actuators; Biomedical computing; Biosensors; Humans; Integrated circuit technology; Medical control systems; Medical diagnostic imaging; Microfluidics; Micromechanical devices; Surgery;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Conference_Location

Shanghai

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.981417

Filename

981417