DocumentCode
2204404
Title
Micro inductors using low temperature fabrication processes for integrated DC-DC microconverters
Author
Estibals, Bruno ; Sanchez, Jean-Louis ; Alonso, Corinne ; Laur, Jean-Pierre ; Salles, Alain ; Bourrier, David ; Dilhan, Monique
Author_Institution
LAAS-CNRS, Toulouse, France
Volume
3
fYear
2005
fDate
2-6 Oct. 2005
Firstpage
2212
Abstract
We present in this paper trends and technologies for the integration of inductors for DC-DC microconverters. In particular, we present the fabrication steps of different structures as a function of the application: planar inductors for low power consumption, and 3D magnetic inductors for higher power. These devices are achieved using low temperature fabrication processes based in photolithography or and electroplating techniques.
Keywords
DC-DC power convertors; electroplating; inductors; photolithography; 3D magnetic inductors; electroplating techniques; integrated DC-DC microconverters; low temperature fabrication processes; microinductors; photolithography; planar inductors; DC-DC power converters; Energy consumption; Energy storage; Fabrication; Frequency; Inductance; Inductors; Lithography; Spirals; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Industry Applications Conference, 2005. Fourtieth IAS Annual Meeting. Conference Record of the 2005
ISSN
0197-2618
Print_ISBN
0-7803-9208-6
Type
conf
DOI
10.1109/IAS.2005.1518755
Filename
1518755
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