• DocumentCode
    2204820
  • Title

    Transient behavior of self-assembled quantum dots formed by atomic layer epitaxy technique

  • Author

    Park, Young Min ; Park, Young Ju ; Kim, Kwang Moo ; Shin, Jae Cheol ; Song, Jin Dong ; Lee, Jung N. ; Yoo, Kwn-Ho

  • Author_Institution
    Nano Device Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
  • fYear
    2003
  • fDate
    25-27 Aug. 2003
  • Firstpage
    161
  • Lastpage
    162
  • Abstract
    We investigated a transient behavior of InGaAs self-assembled quantum dots (SAQD) formed by atomic layer epitaxy technique (ALE). Performing some cycles of InAs/GaAs alternate source supply between InGaAs layers, InGaAs dots-in-a-well structures were spontaneously grown. In order to elucidate the growth mechanism of dots-in-a-well structure, premature SAQD was intentionally prepared by controlling the cycles of source supply. Through the measurement of photoluminescence, not only the discrete quantum well state but also broad emission band was observed, indicating that a mixed structure of QW and QD was existed in a quantum well. The mixed behaviors of the premature QDs were studied in detail using temperature dependence of photoluminescence measurements.
  • Keywords
    III-V semiconductors; atomic layer epitaxial growth; gallium arsenide; indium compounds; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum dots; ALE; InGaAs; InGaAs layers; InGaAs self assembled quantum dots; QD structure; QW structure; atomic layer epitaxy method; emission band; growth mechanism; photoluminescence; temperature dependence; Assembly; Atomic layer deposition; Atomic measurements; Epitaxial growth; Gallium arsenide; Indium gallium arsenide; Photoluminescence; Quantum dots; Temperature dependence; US Department of Transportation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Compound Semiconductors, 2003. International Symposium on
  • Print_ISBN
    0-7803-7820-2
  • Type

    conf

  • DOI
    10.1109/ISCS.2003.1239956
  • Filename
    1239956