DocumentCode
2204820
Title
Transient behavior of self-assembled quantum dots formed by atomic layer epitaxy technique
Author
Park, Young Min ; Park, Young Ju ; Kim, Kwang Moo ; Shin, Jae Cheol ; Song, Jin Dong ; Lee, Jung N. ; Yoo, Kwn-Ho
Author_Institution
Nano Device Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
fYear
2003
fDate
25-27 Aug. 2003
Firstpage
161
Lastpage
162
Abstract
We investigated a transient behavior of InGaAs self-assembled quantum dots (SAQD) formed by atomic layer epitaxy technique (ALE). Performing some cycles of InAs/GaAs alternate source supply between InGaAs layers, InGaAs dots-in-a-well structures were spontaneously grown. In order to elucidate the growth mechanism of dots-in-a-well structure, premature SAQD was intentionally prepared by controlling the cycles of source supply. Through the measurement of photoluminescence, not only the discrete quantum well state but also broad emission band was observed, indicating that a mixed structure of QW and QD was existed in a quantum well. The mixed behaviors of the premature QDs were studied in detail using temperature dependence of photoluminescence measurements.
Keywords
III-V semiconductors; atomic layer epitaxial growth; gallium arsenide; indium compounds; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum dots; ALE; InGaAs; InGaAs layers; InGaAs self assembled quantum dots; QD structure; QW structure; atomic layer epitaxy method; emission band; growth mechanism; photoluminescence; temperature dependence; Assembly; Atomic layer deposition; Atomic measurements; Epitaxial growth; Gallium arsenide; Indium gallium arsenide; Photoluminescence; Quantum dots; Temperature dependence; US Department of Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Compound Semiconductors, 2003. International Symposium on
Print_ISBN
0-7803-7820-2
Type
conf
DOI
10.1109/ISCS.2003.1239956
Filename
1239956
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