DocumentCode :
2205019
Title :
Microfabricated Optical Compressive Load Sensors
Author :
Cole, Garrett D. ; Kotovsky, Jack ; Lin, Kevin L. ; Petersen, Holly E.
Author_Institution :
Livermore Nat. Lab., Livermore
fYear :
2007
fDate :
28-31 Oct. 2007
Firstpage :
446
Lastpage :
449
Abstract :
We demonstrate novel optically-addressable compressive load sensors consisting of bulk micromachined single-crystal silicon transducers integrated with fiber Bragg grating (FBG) sensing elements. These devices constitute a new class of compact optical sensors realized through the integration of mechanical components constructed via microelectromechanical systems (MEMS) fabrication technologies and strain sensitive elements based on FBGs. In this work we present experimental results for an "optical force probe" (OFP) capable of sensing compressive loading transverse to the long-axis of the fiber. Given the transduction mechanism in our design - whereby a compressive load is converted to an axial strain in the fiber - it is possible to use a standard FBG readout system to measure the imparted load. Furthermore, the sensitivity is tunable for any desired load range. Results are presented for compressive loads up to 200 psi, resulting in axial strains approaching 1000 muepsiv in the fiber.
Keywords :
Bragg gratings; fibre optic sensors; micromachining; axial strain; bulk micromachined single-crystal silicon transducers; compact optical sensors; fiber Bragg grating sensing elements; mechanical components; microelectromechanical systems fabrication technologies; microfabricated optical compressive load sensors; optical force probe; strain sensitive elements; Bragg gratings; Capacitive sensors; Fiber gratings; Integrated optics; Mechanical sensors; Optical fiber sensors; Optical sensors; Silicon; Strain measurement; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
ISSN :
1930-0395
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.4388432
Filename :
4388432
Link To Document :
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