Title :
Optimization and test of a calorimetric silicon flow sensor
Author :
Gao, Donghui ; Qin, Ming ; Cheng, Haiyang
Author_Institution :
Key Lab. of MEMS of Educ. Minist., Southeast Univ., Nanjing, China
Abstract :
In this paper, the influence of the geometry design on the output of the sensor is given. The sensitivity and the range of the flow velocity are two key features for the calorimetric sensor considered here. An optimized geometry of the flow sensor is obtained in this paper. Lastly, a sensor is fabricated using the optimum geometry and the experimental results are compared to the simulation results. A good agreement between them is achieved.
Keywords :
calorimetry; geometry; microsensors; temperature sensors; calorimetric silicon flow sensor; flow velocity; optimized geometry; thermal simulation; Fluid flow measurement; Geometry; Sensor phenomena and characterization; Silicon; Solid modeling; Temperature distribution; Temperature measurement; Temperature sensors; Testing; Thermal sensors;
Conference_Titel :
Information Acquisition, 2004. Proceedings. International Conference on
Print_ISBN :
0-7803-8629-9
DOI :
10.1109/ICIA.2004.1373329
