• DocumentCode
    2205197
  • Title

    R-T relation of SnO2-Ag thin film in temperature pulsed operation mode

  • Author

    Gao, Xiaoguang ; Li, Jianping ; He, Xiuli ; Jia, Jian

  • Author_Institution
    State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China
  • fYear
    2004
  • fDate
    21-25 June 2004
  • Firstpage
    103
  • Lastpage
    106
  • Abstract
    The SnO2-Ag thin film was prepared by magnetron sputtering on the Si-based membrane substrate embedded with a platinum micro heater. The sensitive properties of the film to H2S were investigated, and the R-T relation was measured in temperature pulsed operation mode and in simple temperature ramp mode in order to understand the sensitive properties. The results are used to discuss the effect of Ag additive on the R-T relation and sensitive properties of the film. The variation of film resistance shows that the silver promotes the chemical processes on the surface of films. The R-T relation measured in temperature pulsed operation mode can be used to understand the sensing properties of SnO2-Ag film.
  • Keywords
    gas sensors; silver; sputtering; thin films; R-T relation; chemical processes; magnetron sputtering; sensitive property; silver; temperature pulsed operation mode; temperature ramp mode; thin film; Additives; Biomembranes; Electrical resistance measurement; Platinum; Pulse measurements; Sputtering; Substrates; Surface resistance; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Acquisition, 2004. Proceedings. International Conference on
  • Print_ISBN
    0-7803-8629-9
  • Type

    conf

  • DOI
    10.1109/ICIA.2004.1373330
  • Filename
    1373330
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2205197