Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

Summary form only given. In our report, we consider a two dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density. We solve the Maxwell equations for different harmonics in the vector potential using a finite-difference scheme and kinetic equations for both electrons and ions using a Monte-Carlo approach. The direct use of a conventional PIC-MCC technique for modeling of high-density ICP meets a lot of problems caused by the statistical noise of the charge and current density. We have developed a technique which allows to significantly reduce the level of the statistical noise. This technique is based on consideration of correlations in electron motion with and without RF electrical and magnetic fields. Additional reduction of the statistical noise is achieved using the condition of plasma quasineutrality. We compare our numerical results with those found using the two-term approximation for the electron distribution function and with experimental results.