Title :
Gas sensing properties of CNT-SnO2 Nanocomposite Thin Film Prepared by E-beam Evaporation
Author :
Wisitsoraat, A. ; Tuantranont, Adisorn ; Comini, Elisabetta ; Sberveglieri, G.
Author_Institution :
Nat. Electron. & Comput. Technol. Center, Pathumtham
Abstract :
This work presents new results on the gas sensing study of CNT-SnO2 nanocomposite thin film prepared by e-beam evaporation process. The SnO2 gas sensing layers have been achieved with varying CNT concentration. Structural and morphological characterization by means of SEM TEM and XRD indicate that CNTs is incorporated in form of small fragments uniformly dispersed within SnO2 crystal and CNT inclusion does not modify surface morphology and slightly alter the crystal structure. Electrical characterizations highlight a very peculiar and interesting behavior for the layer tested. The SnO2 film´s conductance decreases by more than two orders of magnitude with 1%CNT concentration. As CNT content increases to 1%, CO, ethanol, and particularly NO2 responses are improved and the working temperature tends to reduce. In addition, 1% CNT-SnO2 exhibit maximized response to NO2 with sensitivity of ~10 at very low NO2 concentration of 250 ppb at 200degC.
Keywords :
X-ray diffraction; carbon nanotubes; crystal structure; gas sensors; nanocomposites; scanning electron microscopy; semiconductor thin films; surface morphology; tin compounds; transmission electron microscopy; vacuum deposition; SEM; SnO2; TEM; XRD; crystal structure; e-beam evaporation; electrical characterizations; gas sensing properties; morphological characterization; nanocomposite thin film; structural characterization; surface morphology; varying CNT concentration; Fabrication; Furnaces; Gas detectors; Powders; Sputtering; Substrates; Surface morphology; Temperature sensors; Testing; Thin film sensors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388457