DocumentCode :
2205682
Title :
Precise aperture control of oxidized GaAs surface emitting laser using in-situ monitered oxidation process
Author :
Sai, Hironobu ; Koyarna, F. ; Iga, Kenichi
Author_Institution :
Rohm Co. Ltd.
fYear :
2003
fDate :
25-27 Aug. 2003
Firstpage :
239
Lastpage :
240
Keywords :
Apertures; Gallium arsenide; Infrared surveillance; Laser theory; Monitoring; Optical control; Oxidation; Plasma temperature; Surface emitting lasers; Vertical cavity surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Compound Semiconductors, 2003. International Symposium on
Print_ISBN :
0-7803-7820-2
Type :
conf
DOI :
10.1109/ISCS.2003.1239994
Filename :
1239994
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2205682
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