Title :
Design Parameters Optimization Using Process Variations of the Pull-In Voltage for MEMs
Author :
Voicu, R. ; Tibeica, C. ; Bazu, M.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest
Abstract :
Probability density function for the pull-in voltage of the electrostatically actuated micro-bridges due to variations of some dimensional parameters was estimated using Monte Carlo approach. Variations of the pull-in voltage were analyzed in order to find out optimum design parameters taking into account the given process variations in manufacturing micro-bridge structures
Keywords :
Monte Carlo methods; electrostatic actuators; micromechanical devices; MEMS; Monte Carlo approach; microbridge structures; probability density function; process variation; pull-in voltage; Bridge circuits; Design optimization; Electrodes; Gold; Microelectromechanical devices; Micromechanical devices; Monte Carlo methods; Parameter estimation; Probability density function; Voltage;
Conference_Titel :
Microelectronics, 2006 25th International Conference on
Conference_Location :
Belgrade
Print_ISBN :
1-4244-0117-8
DOI :
10.1109/ICMEL.2006.1650942
