DocumentCode :
2206284
Title :
Design and Fabrication of an Extreme Temperature Sensing Optical Probe using Silicon Carbide Technologies
Author :
Riza, Nabeel A. ; Sheikh, Mumtaz ; Perez, Frank
fYear :
2007
fDate :
28-31 Oct. 2007
Firstpage :
660
Lastpage :
662
Abstract :
For the first time, to the best of our knowledge, designed and fabricated is an extreme temperature optical sensor using a single crystal silicon carbide (SiC) optical chip packaged within a sintered SiC hollow tube. The fabricated assembly forms the critical frontend probe of the proposed hybrid wireless-wired optical sensor used for measuring >1000degC temperatures within hot gas chambers such as in coal-fired power generation systems. Initial probe test experiments show the required water-tight chip-end probe sealing and the desired retro-reflected optical interferograms required for temperature-based signal processing.
Keywords :
optical sensors; silicon compounds; temperature sensors; wide band gap semiconductors; SiC; silicon carbide technologies; temperature optical sensor; temperature sensing optical probe; temperature-based signal processing; Assembly systems; Optical design; Optical device fabrication; Optical sensors; Optical signal processing; Packaging; Probes; Silicon carbide; Temperature sensors; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
ISSN :
1930-0395
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2007.4388485
Filename :
4388485
Link To Document :
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