Analysis of photo-elastic modulation in acceleration sensing

Author

Chen, F. ; Salcic, Z.

Author_Institution

Univ. of Auckland, Auckland

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

667

Lastpage

670

Abstract

A novel accelerometer implemented as a MOEMS (micro-opto-electro-mechanical system) is proposed in the paper. The analysis of photo-elastic effect which is utilized for acceleration sensing is presented. The acceleration is introduced and sensed through a diaphragm structure waveguide on silicon substrate. By analyzing the deformation of the diaphragm, the stress and strain distribution in the diaphragm is calculated. Phase of the light is affected by the strain as well as its distribution in the diaphragm. By using the optical effect for acceleration sensing, the performance of the sensor is improved. Different light modes in waveguide are taken into account in the analysis.

Keywords

accelerometers; micro-optomechanical devices; microsensors; optical sensors; photoelasticity; acceleration sensor; accelerometer; diaphragm deformation; diaphragm structure waveguide; micro-opto-electro-mechanical system; photo-elastic modulation; silicon substrate; Acceleration; Accelerometers; Capacitive sensors; Optical interferometry; Optical materials; Optical modulation; Optical sensors; Optical signal processing; Optical waveguides; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388487

Filename

4388487