Title :
Dual Micro-Thermopile Based Biocalorimeter for Enzyme-Substrate Reaction
Author :
Kwak, Bong-Seop ; Kim, Beom-Seok ; Cho, Hyung-Hee ; Park, Jae-Sung ; Jung, Hyo-Il
Author_Institution :
Yonsei Univ. Seoul, Seoul
Abstract :
This paper presents a new design of silicon-based biocalorimeter made with dual thermopiles and a microfluidic channel introducing a splitting and mixing flow. The dual-thermopile was fabricated with chromium and copper using microelectromechanical system (MEMS) technique, and the microfluidic channel was made of PDMS using a soft-lithography. Each thermopile consists of 26 Cr/Cu thermocouple pairs. The sensitivity of each thermocouple is 20.0 muV/K and the total sensitivity of thermopile is 519.2 muV/K. This dual-thermopile system enables biocalorimeter to acquire the reliable data in a rapid and convenient manner because it detects biochemical reaction and reference temperature simultaneously.
Keywords :
bioMEMS; calorimeters; chromium; copper; lithography; microfluidics; silicon; thermopiles; PDMS; biochemical reaction; dual micro-thermopile based biocalorimeter; enzyme-substrate reaction; microelectromechanical system; microfluidic channel; reference temperature; soft lithography; Chromium; Copper; Fabrication; Mechanical engineering; Microchannel; Microelectromechanical systems; Microfluidics; Navier-Stokes equations; Numerical analysis; Temperature sensors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388506
