Title :
The Characterization and Optimization of the Thermal Oxidation Process Equipment Using Experimental Design and Data Transformation
Author :
Hailong, You ; Xinzhang, Jia ; Shaoxi, Wang
Author_Institution :
Dept. of Microelectron., Xidian Univ., Xi´´an
Abstract :
Using design of experiment and data transformation, the model of thermal oxidation furnace is developed. The model involves six input factors and two responses. Only 16 run experiments are needed through the fractional factorial experimental design. The Box-Cox transformation method is used to transform the experimental data, and the optimum transformation style is determined. The responses are transformed so that the residuals meet the assumption of ANOVA and the model can explore more information here. After responses transformation the figure of merit for fitting, adjust-R2, is improved from 93.54% to 98.64%. The models are subsequently used to optimize the thermal oxidation process. The non-uniformity of film is improved from 0.2% to 0.08% with the other specification satisfied
Keywords :
design of experiments; furnaces; oxidation; semiconductor process modelling; Box-Cox transformation method; data transformation; fractional factorial experimental design; thermal oxidation furnace; thermal oxidation process equipment; Analysis of variance; Design for experiments; Design optimization; Furnaces; Manufacturing processes; Molecular beam epitaxial growth; Oxidation; Plasma applications; Semiconductor films; Semiconductor process modeling;
Conference_Titel :
Microelectronics, 2006 25th International Conference on
Conference_Location :
Belgrade
Print_ISBN :
1-4244-0117-8
DOI :
10.1109/ICMEL.2006.1650974
