Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors

Author

Pedersen, T. ; Hindrichsen, C.C. ; Thomsen, E.V. ; Hansen, K. ; Lou-Møller, R.

Author_Institution

Tech. Univ. of Denmark (DTU), Lyngby

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

756

Lastpage

759

Abstract

In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO₂ thin film is found to be an insufficient diffusion barrier layer for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode.

Keywords

diffusion barriers; lead compounds; micromechanical devices; piezoelectric materials; sintering; thick film sensors; Ferroperm PZ26; MEMS sensors; PZT; ZrO₂; diffusion barrier layer; lead zirconate titanate; piezoelectric thick film; screen printed; sintering; size 450 nm; temperature 850 C; thick film sensors; top-bottom electrode; Accelerometers; Electrodes; Microelectromechanical devices; Micromechanical devices; Piezoelectric devices; Piezoelectric materials; Printing; Testing; Thick film sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388510

Filename

4388510