The design of nano-film tunneling-effect micro gyroscope

The micro gyroscope based on the nano-film tunneling effect is designed and the mesoscopic piezoresistive effect theory of resonant tunneling film structure (RTS) is also researched in this paper. In the mean time, the structure and its material of the RTS are designed and manufactured. The RTS which can explain the resonant tunneling effect reduces the parasitic capacitance of the sensor, improves the negative resistance characteristics of the sensitive film and it can be used in micro gyroscope. Meanwhile, the structure and the parameters of the tunneling effect gyroscope based on the resonant tunneling effect are established. The principle and the simulation of the gyroscope are also made and the simulation results are consistent with the principle.