DocumentCode
2207091
Title
Decoupled Z-axis Microgyroscope Using Oblique Comb for Frequency Tuning
Author
Hsu, Chia-Pao ; Tsai, Deng-Horng ; Yip, Ming-Chuen ; Fang, Weileun
Author_Institution
Nat. Tsing Hua Univ., Hsinchu
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
800
Lastpage
803
Abstract
This paper presents a novel decoupled microgyroscope. The oblique comb electrode within the device has the ability to tune the frequency of the sensing mode. The simulation results show that the driving mode and the sensing mode are well decoupled. The measurement results show that with the dc voltage of 21 V, the sensing mode frequency can be tuned about 51 Hz.
Keywords
gyroscopes; microsensors; tuning; decoupled z-axis microgyroscope; frequency tuning; oblique comb electrode; voltage 21 V; Biomedical electrodes; Fabrication; Force control; Frequency measurement; Gyroscopes; Mechanical engineering; Micromechanical devices; Resonant frequency; Tuning; Unmanned aerial vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388521
Filename
4388521
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