Title :
Decoupled Z-axis Microgyroscope Using Oblique Comb for Frequency Tuning
Author :
Hsu, Chia-Pao ; Tsai, Deng-Horng ; Yip, Ming-Chuen ; Fang, Weileun
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This paper presents a novel decoupled microgyroscope. The oblique comb electrode within the device has the ability to tune the frequency of the sensing mode. The simulation results show that the driving mode and the sensing mode are well decoupled. The measurement results show that with the dc voltage of 21 V, the sensing mode frequency can be tuned about 51 Hz.
Keywords :
gyroscopes; microsensors; tuning; decoupled z-axis microgyroscope; frequency tuning; oblique comb electrode; voltage 21 V; Biomedical electrodes; Fabrication; Force control; Frequency measurement; Gyroscopes; Mechanical engineering; Micromechanical devices; Resonant frequency; Tuning; Unmanned aerial vehicles;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388521
