Title :
Novel sub-25 nm devices [MOSFETs]
Author :
Deshpande, Heinant V. ; Woo, Jason C S
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Recently, there has been much discussion concerning the scaling of MOSFETs into sub-50 nm dimensions. Many fundamental device problems such as short channel effects (DIBL and Vth roll-off), off-state, leakage current, parasitic capacitance and resistance, and gate tunneling current are currently being examined. It is apparent that sub-50 nm transistors can be realized with performance limited primarily by parasitics such as series resistance and capacitance. However, for sub-50 nm devices, new innovation is necessary. The difficulties and challenges to further scaling of CMOS, from digital as well as analog viewpoint are discussed in this paper. Possible new solutions like single pocket structures, Schottky MOSFETs, and double gate MOSFETs are also discussed in this context
Keywords :
MOSFET; capacitance; leakage currents; tunnelling; 10 to 50 nm; CMOS; MOSFETs; gate tunneling current; off-state leakage current; parasitic capacitance; parasitic resistance; short channel effects; single pocket structures; 1f noise; CMOS technology; Logic design; MOSFETs; Parasitic capacitance; Power supplies; RF signals; Radio frequency; Threshold voltage; Tunneling;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.981532