Title :
A small size high pressure sensor based on metal thin film technology
Author :
Stoetzler, A. ; Dittmann, D. ; Henn, R. ; Jasenek, A. ; Klopf, F. ; Scharping, A. ; Frey, W. ; Didra, H.P. ; Metz, M.
Author_Institution :
Frey Automotive Electron. Robert Bosch GmbH, Reutlingen
Abstract :
In this contribution we present the basic design of the new miniaturized high pressure sensor chip based on metal thin film technology (MFT). The steps of chip fabrication will be addressed, and compared with alternative processes. The product performance will be demonstrated by characterization data.
Keywords :
pressure sensors; thin film sensors; MFT; chip fabrication; metal thin film technology; miniaturized high pressure sensor chip; small size high pressure sensor; Automotive applications; Bonding; Capacitive sensors; Petroleum; Sensor phenomena and characterization; Sensor systems; Steel; Substrates; Temperature sensors; Thin film sensors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388528
