DocumentCode
2207275
Title
A small size high pressure sensor based on metal thin film technology
Author
Stoetzler, A. ; Dittmann, D. ; Henn, R. ; Jasenek, A. ; Klopf, F. ; Scharping, A. ; Frey, W. ; Didra, H.P. ; Metz, M.
Author_Institution
Frey Automotive Electron. Robert Bosch GmbH, Reutlingen
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
825
Lastpage
827
Abstract
In this contribution we present the basic design of the new miniaturized high pressure sensor chip based on metal thin film technology (MFT). The steps of chip fabrication will be addressed, and compared with alternative processes. The product performance will be demonstrated by characterization data.
Keywords
pressure sensors; thin film sensors; MFT; chip fabrication; metal thin film technology; miniaturized high pressure sensor chip; small size high pressure sensor; Automotive applications; Bonding; Capacitive sensors; Petroleum; Sensor phenomena and characterization; Sensor systems; Steel; Substrates; Temperature sensors; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388528
Filename
4388528
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