Title :
Analytical threshold voltage model for ultrathin SOI MOSFET´s
Author :
Xin-Yu, Liu ; Hai-Feng, Sun ; De-xin, Wu
Author_Institution :
Microelectron. R&D Center, Chinese Acad. of Sci., China
Abstract :
The threshold voltage of fully depleted silicon-on-insulator (SOI) MOSFET with channel lengths down to the deep-submicrometer range has been investigated. By applying Gauss´s law, a quasi-two-dimensional analytical threshold voltage model for ultra-thin SOI fully depleted MOSFET´s including the short-channel effect (SCE) is achieved. Furthermore, we consider further the threshold voltage of FDSOI MOSFET and in particular the value of the surface potential at threshold. It is shown that the surface potential at FDSOI MOSFET threshold may differ significantly from 2 φ i. We extend this model by accounting for surface potential about P+ poly-silicon gate, a closed form expression for the threshold voltage is obtained and compared with experimental data for several SOI FD MOSFET´s
Keywords :
MOSFET; semiconductor device models; silicon-on-insulator; surface potential; FDSOI MOSFET; Gauss´s law; P+ poly-silicon gate; SCE; Si; closed form expression; deep-submicrometer channel length; quasi-two-dimensional analytical threshold voltage model; short-channel effect; surface potential; ultra-thin SOI fully depleted MOSFET; ultrathin SOI MOSFET; Analytical models; Gaussian channels; Gaussian processes; MOSFET circuits; Microelectronics; Silicon on insulator technology; Sun; Surface fitting; Threshold voltage; Transistors;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.981540