DocumentCode
2207314
Title
Process and Device Simulation with a Generic Scientific Simulation Environment
Author
Spevak, Michael ; Heinzl, René ; Schwaha, Philipp ; Grasser, Tibor
Author_Institution
Inst. for Microelectron., Tech. Univ. Vienna
fYear
0
fDate
0-0 0
Firstpage
443
Lastpage
446
Abstract
We present a high performance environment for scientific simulation applications (GSSE). This environment is based on the three orthogonal concepts of topology, geometry, and quantities. Lambda calculus is used in order to assemble various partial differential equations for TCAD and other physical equations. We present examples from device and process simulation which show the applicability of our environment. Despite the high abstraction level we can achieve high performance
Keywords
calculus; partial differential equations; technology CAD (electronics); TCAD; device simulation; generic scientific simulation environment; lambda calculus; partial differential equations; process simulation; Computational modeling; Differential equations; Electronic mail; Finite element methods; Libraries; Microelectronics; Partial differential equations; Solid modeling; Testing; Topology;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2006 25th International Conference on
Conference_Location
Belgrade
Print_ISBN
1-4244-0117-8
Type
conf
DOI
10.1109/ICMEL.2006.1650996
Filename
1650996
Link To Document