Title :
Pressure Sensor Using Electrokinetic Energy Conversion Phenomena
Author :
Kim, Duckjong ; Park, Sang-Jin ; Kim, Dong-Kwon ; Kim, Sung Jin
Author_Institution :
Korea Inst. of Machinery & Mater., Daejeon
Abstract :
In this paper, a new electrokinetic pressure sensor is developed. Test results show that the proposed sensor has good linearity and high sensitivity. Moreover, numerical results show that the sensitivity can be improved 10 times more which is 100 times as high as that of the diaphragm-based pressure sensors.
Keywords :
electrokinetic effects; pressure sensors; diaphragm based pressure sensors; electrokinetic energy conversion; electrokinetic pressure sensor; good linearity; high sensitivity; Capacitive sensors; Electrodes; Electrokinetics; Energy conversion; Etching; Mechanical sensors; Microchannel; Microfluidics; Sensor phenomena and characterization; Voltage;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388547
