Title :
Properties of InSb thin films sandwiched by Al0.1In0.9Sb insulating layers grown on GaAs(100) substrates by molecular beam epitaxy
Author :
Shibasaki, Ichiro ; Geka, Hirotaka ; Yamada, Satoshi ; Okamoto, Atsusi ; Goto, Hiromasa
Author_Institution :
Asahikasei Corp., Shizuoka
Abstract :
InSb single crystal thin films of less than 0.5-mum thickness sandwiched by Al0.1In0.9Sb layers (with 0.5% lattice mismatch between InSb and Al0.1In0.9Sb ) suitable for magnetic sensors were grown by molecular beam epitaxy on a GaAs(100) substrate and their properties were studied. The large lattice mismatch effect observed at the InSb/GaAs hetero-interface may be almost eliminated. The electron mobility of these InSb thin films was significantly higher than that of InSb thin films directly grown on GaAs substrate. By doping Sn into InSb thin films, almost a one-order smaller value of temperature coefficients for the InSb films were obtained for electron mobility and sheet resistance around room temperature. Thus, by Sn doping, the reduction of temperature dependence was verified for InSb thin films sandwiched by AlInSb layers. As a result, we obtained a high electron mobility and high sheet resistance suitable for magnetic sensors, such as Hall elements and magnetoresistance elements.
Keywords :
Hall effect; III-V semiconductors; aluminium compounds; electrical resistivity; electron mobility; gallium arsenide; indium compounds; insulating thin films; magnetic sensors; magnetoresistance; molecular beam epitaxial growth; semiconductor thin films; GaAs; GaAs(100) substrates; Hall elements; InSb-Al0.1In0.9Sb; electron mobility; insulating layers; lattice mismatch; magnetic sensors; magnetoresistance elements; molecular beam epitaxy; sheet resistance; single crystal thin films; temperature coefficients; Doping; Electron mobility; Gallium arsenide; Lattices; Magnetic films; Magnetic sensors; Substrates; Thin film sensors; Tin; Transistors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388550