Ferroelectric thin films fabricated by sol-gel technique

Author

Xu, Yuhuan

Author_Institution

Simax Technol., Inc., Irvine, CA, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

696

Abstract

This paper reviews our studies of sol-gel processes for some of ferroelectric thin films, including PZT, PLZT, BaTiO₃, LiNbO ₃, KNbO₃, and Sr_0.6Ba_0.4Nb ₂O₆, etc. Different microstructures, such as epitaxial (single crystal-like), polycrystalline, and amorphous films, which depend on the sol-gel processing, were studied. Some interested phenomena including thickness effect, interface effect, ferroelectric-like property of amorphous, second harmonic generation, electro-optical effect, and piezoelectric effect as well as their potential applications are discussed

Keywords

amorphous state; electro-optical effects; epitaxial layers; ferroelectric thin films; optical harmonic generation; piezoelectricity; sol-gel processing; BaTiO₃; KNbO₃; LiNbO₃; PLZT; PZT; PbLaZrO3TiO3; PbZrO3TiO3; Sr_0.6Ba_0.4Nb₂O₆; amorphous films; electro-optical effect; epitaxial films; ferroelectric thin films; piezoelectric effect; polycrystalline films; second harmonic generation; sol-gel processes; thickness; Amorphous materials; Crystal microstructure; Ferroelectric films; Ferroelectric materials; Frequency conversion; Niobium; Piezoelectric effect; Piezoelectric films; Strontium; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Conference_Location

Shanghai

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.981599

Filename

981599