Title :
PZT based bulk acoustic wave RF filters
Author :
Ren, Tian-Ling ; Liu, Yan-Xiang ; Liu, Jian-She ; Liu, Li-Tian ; Li, Zhi-Jian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Analytical solutions of the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBARs) are presented. The impedance for PZT based FBAR is derived utilizing proper boundary conditions and their material parameters. A novel method to adjust the resonant frequency is proposed corresponding to the process feasibility and material properties. Ferroelectric-based RF filters composed of FBARs are designed
Keywords :
acoustic resonator filters; bulk acoustic wave devices; crystal filters; lead compounds; radiofrequency filters; wave equations; PZT; PbZrO3TiO3; boundary conditions; bulk acoustic wave RF filters; electrode-piezoelectric-electrode sandwich structure; ferroelectric-based filters; film bulk acoustic resonators; linear piezoelectric equations; material properties; process feasibility; resonant frequency; thickness mode resonance; wave equation; Acoustic waves; Boundary conditions; Ferroelectric materials; Film bulk acoustic resonators; Impedance; Partial differential equations; Radio frequency; Resonant frequency; Resonator filters; Sandwich structures;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.981606
